[D-6-3] 3D-Technology for Ultra High Density MOS Arrays

Wolfgang H. KRAUTSCHNEIDER、Andreas RUSCH、Franz HOFMANN、Frank LAU、Barbara HASLER、Armin KOHLHASE、Ulrich ZIMMERMANN、Emmerich BERTAGNOLLI (1.Siemens, Corporate Research、2.Siemens, Semiconductor Group)

https://doi.org/10.7567/SSDM.1996.D-6-3