[PD-4-5] A Novel Shallow Trench Isolation Technique

Juing-Yi Cheng, Tan Fu Lei, Tien Sheng Chao (1.Department of Electronics Engineering and Institute of Electronics National Chiao Tung University and, 2.National Nano Device Laboratory)

https://doi.org/10.7567/SSDM.1996.PD-4-5