[Sympo.I-13] New Electrically-Thinned Intrinsic-Channel SOI MOSFET with 0.01μm Channel Length

Tamio SHIMATANI, Sergey PIDIN, Mitsumasa KOYANAGI (1.Dept. of Machine Intelligence and System Engineering, Intelligent System Design Laboratory, Tohoku University)

https://doi.org/10.7567/SSDM.1996.Sympo.I-13