[Sympo.I-4] Vacuum Bonding for the Fabrication of PBSOI

G. Cha, B. H. Lee, K. W. Lee, G. J. Bae, J. Moon, S. I. Lee (1.Semiconductor R&D center, SAMSUNG Electronics Co., LTD)

https://doi.org/10.7567/SSDM.1996.Sympo.I-4