[Sympo.I-4] Vacuum Bonding for the Fabrication of PBSOI

G. Cha、B. H. Lee、K. W. Lee、G. J. Bae、J. Moon、S. I. Lee (1.Semiconductor R&D center, SAMSUNG Electronics Co., LTD)

https://doi.org/10.7567/SSDM.1996.Sympo.I-4