Side Gate Single Electron Transistor with Multi-Islands Structure Operated at Room Temperature Made by STM/AFM Nano-Oxidation Process

[Sympo.III-2] Side Gate Single Electron Transistor with Multi-Islands Structure Operated at Room Temperature Made by STM/AFM Nano-Oxidation Process

Kazuhiko MATSUMOTO、Masami ISHII、Jun-ichi SHIRAKASHI、Bartev J. VARTANIAN、James S. HARRIS (1.Electrotechnical Laboratory MITI、2.Stanford University)