[A-11-3] Initial Stages of Cu Growth on Polyimide Deposited by Ionized Cluster Beam

N. Y. Kim, C. E. Hong, H.-S. Yoon, S. Y. Kim, K. W. Kim, Y. S. Lee, C. N. Whang (1.Dept. of Physics, Yonsei University, 2.Dept. of Physics, Soongsil University, 3.Dept. of Physics, Sunmoon University)

https://doi.org/10.7567/SSDM.1997.A-11-3