[A-8-2] A Process Integration of (Ba, Sr) TiO3 Capacitor into 256M DRAM

Cheol Seong Hwang、Byoung Taek Lee、Hideki Horii、Ki Hoon Lee、Wan don Kim、Hag-Ju Cho、Chang Seok Kang、Sang In Lee、Moon Yong Lee (1.SAMSUNG Electronics, Co., Semiconductor R&D Center, MPD Team)

https://doi.org/10.7567/SSDM.1997.A-8-2