[C-11-1] Deep-Submicron Single-Gate CMOS Technology Using Channel Preamorphization

Masayasu Miyake, Toshio Kobayashi, Yutaka Sakakibara, Kimiyoshi Deguchi, Mitsutoshi Takahashi (1.NTT System Electronics Laboratories)

https://doi.org/10.7567/SSDM.1997.C-11-1