[C-13-3] Effects of Buffer Layer Structure in Poly Buffered LOCOS for Deep Submicron Silicon Devices

Jong-Ho Lee、Tae Moon Roh、Jong-Son Lyu、Bo Woo Kim、Hyung Joun Yoo (1.Semiconductor Technology Division, ETRI、2.School of Electrical Eng. Wonkwang University)

https://doi.org/10.7567/SSDM.1997.C-13-3