[C-13-3] Effects of Buffer Layer Structure in Poly Buffered LOCOS for Deep Submicron Silicon Devices

Jong-Ho Lee, Tae Moon Roh, Jong-Son Lyu, Bo Woo Kim, Hyung Joun Yoo (1.Semiconductor Technology Division, ETRI, 2.School of Electrical Eng. Wonkwang University)

https://doi.org/10.7567/SSDM.1997.C-13-3