[C-8-2] Fabrication of Gate Overlapped-LDD poly-Si TFT for Large Area AMLCD

Kwon-Young Choi、Kee-Chan Park、Cheon-Hong Kim、Juhn-Suk Yoo、Min-Koo Han (1.School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.1997.C-8-2