[C-8-2] Fabrication of Gate Overlapped-LDD poly-Si TFT for Large Area AMLCD

Kwon-Young Choi, Kee-Chan Park, Cheon-Hong Kim, Juhn-Suk Yoo, Min-Koo Han (1.School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.1997.C-8-2