[C-9-5] Short-Channel Effects in N- and P-Channel Polysilicon Thin Film Transistors with Very Thin ECR N2O-Plasma Gate Dielectrics

Jin-Woo Lee, Nae-In Lee, Chul-Hi Han (1.Dept. of E. E., KAIST)

https://doi.org/10.7567/SSDM.1997.C-9-5