[D-12-4] Formation and Characterization of Thin Oxide Layers on the Spatially Controlled Atomic-Step-Free Si(001) Surface

Atsushi Ando, Kunihiro Sakamoto, Kazushi Miki, Kazuhiko Matsumoto, Tsunenori Sakamoto (1.Electrotechnical Laboratory (ETL))

https://doi.org/10.7567/SSDM.1997.D-12-4