[D-7-2] Medium Field Breakdown Following Local Tunneling Current on MOS Capacitor Containing Grown-in CZ Crystal Defects

Masaro Tamatsuka, Zbigniew Radzimski, George A. Rozgonyi, Satoshi Oka, Masahiro Kato, Yutaka Kitagawara (1.Department of Materials Science and Engineering, North Carolina State University, 2.SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd., 3.SEH America, Inc.)

https://doi.org/10.7567/SSDM.1997.D-7-2