[P4-7] Frequency Dependence of Capacitance Measurement for Advanced Gate Dielectrics

Kevin J. Yang、Hideki Takeuchi、Tsu-Jae King、Chenming Hu (1.University of California, Department of Electrical Engineering and Computer Sciences)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-8] The Electrical Conduction of Ultra Thin SiO2 on Slightly Iron-contaminated p-type Si Wafers

M. N. Chang、C. Y. Chen、T. Y. Chang、F. M. Pan、T. F. Lei (1.National Nano Device Laboratories、2.Department of Electronics Engineering, National Chiao Tung University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-9] Scaning Tunneling Microscopy of Initial Nitridation Processes on Oxidized Si(100) Surface with Radical Nitrogen

Ryoya Takahashi、Yasushi Kobayashi、Hiroya Ikeda、Mitsuo Sakashita Osamu Nakatsuka、Akira Sakai、Shigeaki Zaima、Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University、2.Center for Integrated Research in Science and Engineering, Nagoya University、3.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-10] Ordered 1 x 1 SiH2 Monolayer Adsorption on Si(001) from Cracked Si2H6 and Its Application to ALE Growth Operation

Naoyuki Hosoya、Kazushi Miki、Yoshiyuki Suda (1.Faculty of Technology, Tokyo University of Agriculture and Technology、2.Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-11] Analysis of porous silicon formation process using infrared absorption spectroscopy and Monte Carlo simulation

Yasuo Kimura、Hisao Ishii、Michio Niwano (1.Research Institute of Electrical Communication, Tohoku University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-12] Quantum Chemical Molecular Dynamics Simulation on the Dynamics and Stability of the MgO Protecting Layer in Plasma Display

Momoji Kubo、Katsumi Sasata、Toshiyuki Yokosuka、Tomonori Kusagaya、Seiichi Takami、Akira Kato、Akira Imamura、Akira Miyamoto (1.Department of Materials Chemistry, Graduate School of Engineering, Tohoku University、2.Hitachi Research Laboratory, Hitachi Ltd.、3.Hiroshima Kokusai Gakuin University、4.New Industry Creation Hatchery Center, Tohoku University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-13] Application of Thin Nano-Crystalline VN Barrier in Cu/VN/SiO2/Si Systems

Mayumi B. Takeyama、Kazumi Satoh、Takaomi Itoi、Masakazu Sakagami、Atsushi Noya (1.Kitami Institute of Technology, Dept. Electrical and Electronic Engineering)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-14] Analysis of Pore Structures in Ultra Low-k Dielectrics

N. Hata、C. Negoro、K. Yamada、H. S. Zhou、Y. Oku、T. Kikkawa (1.MIRAI Project, ASRC, AIST、2.ASRC, AIST、3.MIRAI Project, ASET、4.Energy Electronics Institute, AIST、5.RCNS, Hiroshima Univ.)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P4-15] Spectral Response Characteristics of a-Se HARP Films by Te Doping

Wug-Dong Park、Kenkichi Tanioka (1.Dongyang University, School of Electronic Engineering、2.NHK Science and Technical Research Laboratories, Advanced Imaging Devices Research Division)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LP4-1] Properties of pulsed laser deposited CuI and characteristics of constructed dye-sensitized TiO2｜dye｜CuI solid states photovoltaic solar cells

M. RUSOP、T. SHIRATA、P. M. SIRIMANNE、T. SOGA、T. JIMBO (1.Department of Environmental Technology and Urban Planning, Research Center for Micro Structure Devices, Nagoya Institute of Technology)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード