[A-3-2] 1-nm Spatial Resolution in Carrier Mapping of Ultra-Shallow Junctions by Scanning Spreading Resistance Microscopy

L. Zhang¹、H. Tanimoto¹、K. Adachi¹、N. Yasutake¹、A. Nishiyama¹ (1.Toshiba Corp., Japan)

https://doi.org/10.7567/SSDM.2008.A-3-2