[A-3-2] 1-nm Spatial Resolution in Carrier Mapping of Ultra-Shallow Junctions by Scanning Spreading Resistance Microscopy
L. Zhang1, H. Tanimoto1, K. Adachi1, N. Yasutake1, A. Nishiyama1
(1.Toshiba Corp., Japan)
https://doi.org/10.7567/SSDM.2008.A-3-2
