[A-3-3] Carrier Density Mapping of Small n-MOSFET Devices by Vacuum-gap Modulation Scanning Tunneling Spectroscopy

L. Bolotov¹, M. Nishizawa¹, T. Kanayama¹ (1.MIRAI-AIST, Japan)

https://doi.org/10.7567/SSDM.2008.A-3-3