Vertical Scaling of Metal/High-k Gate Stacked MOSFETs for Hp45 and Beyond

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

T. Matsuki¹, T. Watanabe¹, T. Morooka¹, M. Sato¹, M. Kadoshima¹, T. Onizawa¹, T. Eimori¹, M. Nakamura¹, Y. Nara¹, Y. Ohji¹ (1.Selete, Japan)