The Japan Society of Applied Physics

[B-10-1] Accuracy Assessment of Charge-Based Capacitance Measurement for Nanoscale MOSFET Devices

H. Zhao1,2, S. C. Rustagi1, F. Ma1,2, G. S. Samudra2, N. Singh1, G. Q. Lo1, D. L. Kwong1 (1.Inst. of Microelectronics, 2.National Univ. of Singapore, Singapore)

https://doi.org/10.7567/SSDM.2008.B-10-1