[B-8-2] Understanding the Effect of Laser Anneal on LSTP 45nm Node MOS Transistor Electrical Parameters

A. Cros¹、S. Renard¹、M. Bidaud¹、R. Ranica¹、G. Ribes¹、E. Josse¹、B. Dumont¹、R. Beneyton¹、K. Barla¹、M. Haond¹、H. Brut¹ (1.STMicroelectronics, France)

https://doi.org/10.7567/SSDM.2008.B-8-2