[C-2-2] Narrow Trench Filled Source/Drain Contact for 3D MOSFET

H. B. Lee¹、S. H. Ahn¹、B. G. Kim¹、W. C. Choi¹、J. H. Jung¹、J. H. Lee¹、S. H. Hahm¹ (1.Kyungpook National Univ., Korea)

https://doi.org/10.7567/SSDM.2008.C-2-2