[C-6-3] Low-k Impact on Circuit Performance Demonstrated in High-Speed LSIs

M. Tada²、N. Inoue¹、J. Kawahara¹、H. Yamamoto¹、F. Ito¹、T. Fukai¹、M. Ueki¹、S. Miyake¹、T. Takeuchi¹、S. Saito¹、M. Tagami¹、N. Furutake¹、K. Hijioka¹、T. Ito¹、Y. Shibue¹、T. Senou¹、R. Ikeda¹、N. Okada¹、Y. Hayashi¹ (1.NEC Electronics Corp.、2.NEC Corp., Japan)

https://doi.org/10.7567/SSDM.2008.C-6-3