Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora<sup>&#174;</sup> LK

S. Demuynck; H. G. Kim; C. Huffman; M. Darnon; H. Struyf; J. Versluijs; M. Claes; G. Vereecke; P. Verdonck; H. Volders; N. Heylen; K. Kellens; D. De Roest; H. Sprey; G. P. Beyer

doi:https://doi.org/10.7567/SSDM.2008.C-6-4

[C-6-4] Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora^® LK

S. Demuynck¹, H. G. Kim², C. Huffman¹, M. Darnon¹, H. Struyf¹, J. Versluijs¹, M. Claes¹, G. Vereecke¹, P. Verdonck¹, H. Volders¹, N. Heylen¹, K. Kellens¹, D. De Roest³, H. Sprey³, G. P. Beyer¹ (1.IMEC, Belgium, 2.Samsung Electronics Co., Ltd., Korea, 3.ASM, Belgium)

https://doi.org/10.7567/SSDM.2008.C-6-4

2008 International Conference on Solid State Devices and Materials

[C-6-4] Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora® LK

[C-6-4] Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora^® LK