Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora<sup>&#174;</sup> LK

S. Demuynck; H. G. Kim; C. Huffman; M. Darnon; H. Struyf; J. Versluijs; M. Claes; G. Vereecke; P. Verdonck; H. Volders; N. Heylen; K. Kellens; D. De Roest; H. Sprey; G. P. Beyer

doi:https://doi.org/10.7567/SSDM.2008.C-6-4

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[C-6-4] Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora^® LK

S. Demuynck¹、H. G. Kim²、C. Huffman¹、M. Darnon¹、H. Struyf¹、J. Versluijs¹、M. Claes¹、G. Vereecke¹、P. Verdonck¹、H. Volders¹、N. Heylen¹、K. Kellens¹、D. De Roest³、H. Sprey³、G. P. Beyer¹ (1.IMEC, Belgium、2.Samsung Electronics Co., Ltd., Korea、3.ASM, Belgium)

https://doi.org/10.7567/SSDM.2008.C-6-4

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2008 International Conference on Solid State Devices and Materials

[C-6-4] Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora® LK

[C-6-4] Dielectric Reliability of 50 nm 1/2 Pitch Structures in Aurora^® LK