[H-5-2] Impact of Quantum Effect on Diffusion Layer Resistance of Si Nanowire MOSFETs

D. Hagishima¹、K. Matsuzawa¹、S. Odanaka² (1.Toshiba Corp.、2.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.H-5-2