The Japan Society of Applied Physics

[J-5-1] Three Dimensional Flash Memory with Bit Cost Scalable Technology for the Future Ultra High Density Storage Devices (Invited)

H. Aochi1, M. Kito1, Y. Fukuzumi1, M. Kido1, H. Tanaka1, Y. Matsuoka1, Y. Komori1, M. Ishiduki1, Y. Nagata2, R. Katsumata1, Y. Iwata1, A. Nitayama1 (1.Toshiba Corp., 2.Toshiba Information Systems Corp., Japan)

https://doi.org/10.7567/SSDM.2008.J-5-1