Low Temperature GAA Poly-Si Nanowire TFT SONOS Memory for MLC Application

J. Fu; Y. Jiang; N. Singh; C. X. Zhu; G. Q. Lo; N. Balasubramanian; D. L. Kwong

doi:https://doi.org/10.7567/SSDM.2008.J-5-2

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[J-5-2] Low Temperature GAA Poly-Si Nanowire TFT SONOS Memory for MLC Application

J. Fu^1,2、Y. Jiang^1,2、N. Singh¹、C. X. Zhu^1,2、G. Q. Lo¹、N. Balasubramanian¹、D. L. Kwong¹ (1.Inst. of Microelectronics、2.National Univ. of Singapore, Singapore)

https://doi.org/10.7567/SSDM.2008.J-5-2

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