The Japan Society of Applied Physics

[J-6-3] A New Embedded NVM Thin Film Cell for Low Voltage Applications

G. Bossu1,2、A. Demolliens1,2、S. Puget1,2、P. Masson3、J. M. Portal2、R. Bouchakour2、P. Mazoyer1、T. Skotnicki1 (1.STMicroelectronics、2.IM2NP、3.Univ. de Nice-Sophia Antipolis, France)

https://doi.org/10.7567/SSDM.2008.J-6-3