[J-7-1] Enhanced Memory Performances of Advanced Impurity Trap Memory with Atomic-scale Ti Impurity Embedded in Ultrathin LaAlO₃ as a Charge Trap Layer

S. Jung¹、H. Choi¹、Y. Ju¹、M. Chang¹、M. Pyun¹、H. Hwang¹ (1.Gwangju Inst. of Sci. and Tech., Korea)

https://doi.org/10.7567/SSDM.2008.J-7-1