The Japan Society of Applied Physics

2008 International Conference on Solid State Devices and Materials

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[J-8-2] Hydrogen-and-Stress-Induced de-lamination in an IrO2 Layer of FRAMs

J. H. Kim1, D. J. Jung1, H. H. Kim1, Y. K. Hong1, E. S. Lee1, S. Y. Kim1, J. Y. Jung1, H. K. Koh1, D. Y. Choi1, S. K. Kang1, H. Kim1, W. W. Jung1, J. Y. Kang1, Y. M. Kang1, S. Y. Lee1, H. S. Jeong1 (1.Samsung Electronics Co., Ltd., Korea)

https://doi.org/10.7567/SSDM.2008.J-8-2