Trap-Related Carrier Transports in p-FET with Poly-Si/HfSiON Gate Stack

J. Chen; T. Sekiguchi; N. Fukata; M. Takase; T. Chikyo; R. Hasunuma; K. Yamabe; M. Sato; Y. Nara; K. Yamada

doi:https://doi.org/10.7567/SSDM.2008.P-1-12

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-1-12] Trap-Related Carrier Transports in p-FET with Poly-Si/HfSiON Gate Stack

J. Chen¹、T. Sekiguchi¹、N. Fukata¹、M. Takase¹、T. Chikyo¹、R. Hasunuma²、K. Yamabe²、M. Sato³、Y. Nara³、K. Yamada⁴ (1.NIMS、2.Univ. of Tsukuba、3.Selete、4.Waseda Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-12

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