Trap-Related Carrier Transports in p-FET with Poly-Si/HfSiON Gate Stack

J. Chen; T. Sekiguchi; N. Fukata; M. Takase; T. Chikyo; R. Hasunuma; K. Yamabe; M. Sato; Y. Nara; K. Yamada

doi:https://doi.org/10.7567/SSDM.2008.P-1-12

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-1-12] Trap-Related Carrier Transports in p-FET with Poly-Si/HfSiON Gate Stack

J. Chen¹, T. Sekiguchi¹, N. Fukata¹, M. Takase¹, T. Chikyo¹, R. Hasunuma², K. Yamabe², M. Sato³, Y. Nara³, K. Yamada⁴ (1.NIMS, 2.Univ. of Tsukuba, 3.Selete, 4.Waseda Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-12

▲