[P-1-13] Significance of Interface Layer between Surface Layer and Si Substrate in Plasma-Exposed Structures and its Impacts on Plasma-Induced Damage Analysis

A. Matsuda¹, Y. Nakakubo¹, Y. Ueda¹, H. Ohta¹, K. Eriguchi¹, K. Ono¹ (1.Kyoto Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-13