Thermal Stability of High-κ Dielectrics - A Nanocharacterization Perspective

Y. C. Ong; D. S. Ang; S. J. O'Shea; K. L. Pey; T. Kawanago; S. J. Wang; C. H. Tung; K. Kakushima; H. Iwai

doi:https://doi.org/10.7567/SSDM.2008.P-1-17

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-1-17] Thermal Stability of High-κ Dielectrics - A Nanocharacterization Perspective

Y. C. Ong¹, D. S. Ang¹, S. J. O'Shea², K. L. Pey¹, T. Kawanago⁴, S. J. Wang², C. H. Tung³, K. Kakushima⁴, H. Iwai⁴ (1.Nanyang Tech. Univ., 2.Inst. of Materials Res. and Eng., 3.Inst. of Microelectronics, Singapore, 4.Tokyo Tech., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-17

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