[P-1-18] Negative Bias Temperature Instability (NBTI) of pMOSFETs with Novel Hf_xMo_yN_z Metal Gate Electrodes

H. K. Peng¹, C. S. Lai¹, K. M. Fan¹, S. J. Lin² (1.Chang Gung Univ., 2.Nanya Tech. Corp., Taiwan)

https://doi.org/10.7567/SSDM.2008.P-1-18