[P-2-2] Raman Spectroscopic Stress Analysis of Single Crystal Silicon (001) Specimen Tensioned Along the [100] Direction over 1000 MPa

M. Komatsubara¹, Y. Nagai¹, T. Namazu¹, N. Naka², S. Kashiwagi², K. Ohtsuki², S. Inoue¹ (1.Univ. of Hyogo, 2.HORIBA, Ltd., Japan)

https://doi.org/10.7567/SSDM.2008.P-2-2