Analysis of Threshold Voltage Variations of FinFETs : Separation of Short Channel Effects and Space Charge Effects

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

Y. Kobayashi¹, K. Tsutsui¹, K. Kakushima¹, P. Ahmet¹, V. R. Rao², H. Iwai¹ (1.Tokyo Tech., Japan, 2.Indian Inst. of Tech. Bombay, India)