The Japan Society of Applied Physics

[P-3-12] Analysis of Threshold Voltage Variations of FinFETs : Separation of Short Channel Effects and Space Charge Effects

Y. Kobayashi1, K. Tsutsui1, K. Kakushima1, P. Ahmet1, V. R. Rao2, H. Iwai1 (1.Tokyo Tech., Japan, 2.Indian Inst. of Tech. Bombay, India)

https://doi.org/10.7567/SSDM.2008.P-3-12