[P-3-12] Analysis of Threshold Voltage Variations of FinFETs : Separation of Short Channel Effects and Space Charge Effects

Y. Kobayashi¹、K. Tsutsui¹、K. Kakushima¹、P. Ahmet¹、V. R. Rao²、H. Iwai¹ (1.Tokyo Tech., Japan、2.Indian Inst. of Tech. Bombay, India)

https://doi.org/10.7567/SSDM.2008.P-3-12