Electrical and Structural Evaluations of Ultrathin SiGe- and Ge-on-insulator Fabricated using Ge Condensation by Dry Oxidation

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

H. Yang¹, D. Wang¹, H. Gao¹, K. Hirayama¹, K. Ikeda¹, S. Hata¹, H. Nakashima¹ (1.Kyushu Univ., Japan)