Electrical and Structural Evaluations of Ultrathin SiGe- and Ge-on-insulator Fabricated using Ge Condensation by Dry Oxidation

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

H. Yang¹、D. Wang¹、H. Gao¹、K. Hirayama¹、K. Ikeda¹、S. Hata¹、H. Nakashima¹ (1.Kyushu Univ., Japan)