[A-1-2] V_th Dependence of V_th Variability in Intrinsic Channel SOI MOSFETs with Ultra-Thin BOX

C. Lee¹, A. T. Putra¹, K. Shimizu¹, T. Hiramoto^1,2 (1.Univ. of Tokyo(Japan), 2.MIRAI-Selete(Japan))

https://doi.org/10.7567/SSDM.2009.A-1-2