[A-1-2] V_th Dependence of V_th Variability in Intrinsic Channel SOI MOSFETs with Ultra-Thin BOX

C. Lee¹、A. T. Putra¹、K. Shimizu¹、T. Hiramoto^1,2 (1.Univ. of Tokyo(Japan)、2.MIRAI-Selete(Japan))

https://doi.org/10.7567/SSDM.2009.A-1-2