2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

[A-2-3] Impact of interface roughness on threshold-voltage variation in ultra-small three-dimensional MOSFETs

N. Mori¹, H. Minari¹ (1.Osaka Univ.)

https://doi.org/10.7567/SSDM.2009.A-2-3

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