[A-5-2] A New Diamond-like Carbon (DLC) Ultra-High Stress Liner Technology for Direct Deposition on P-Channel Field-Effect Transistors

B. Liu¹、M. C. Yang²、Y. C. Yeo¹ (1.National Univ. of Singapore(Singapore)、2.Data Storage Inst.(Singapore))

https://doi.org/10.7567/SSDM.2009.A-5-2