[B-2-2] Lanthanoid Metal Oxide MIM Capacitors for Precision Analog Circuits: Material Screening, Process Development, and Characterization

J. D. Chen¹, J. J. Yang¹, R. Wise², P. Steinmann², C. Zhu¹, Y. C. Yeo¹ (1.National Univ. of Singapore(Singapore), 2.Texas Instruments Inc.(USA))

https://doi.org/10.7567/SSDM.2009.B-2-2