[B-6-1] Advanced Low Temperature Raised S/D Epitaxy Using Cyclic and Poly-Selective Techniques

N. Loubet¹, P. Khare¹, Q. Liu¹, M. Takayanagi², R. Sampson¹ (1.STMicroelectronics(USA), 2.Toshiba America Electronic Components(USA))

https://doi.org/10.7567/SSDM.2009.B-6-1