[B-6-1] Advanced Low Temperature Raised S/D Epitaxy Using Cyclic and Poly-Selective Techniques

N. Loubet¹、P. Khare¹、Q. Liu¹、M. Takayanagi²、R. Sampson¹ (1.STMicroelectronics(USA)、2.Toshiba America Electronic Components(USA))

https://doi.org/10.7567/SSDM.2009.B-6-1